000 00330nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a0895732807
082 _a621.38173 B124
100 _aBACHMANN,KJ
245 0 _aMATERIALS SCIENCE OF MICROELECTRONICS
260 _aNEW YORK
_bVCH
_c1995
300 _a24X16
942 _cBK
_2DDC
999 _c26311
_d26311