| 000 | 00391nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 190711s9999 xx 000 0 und d | ||
| 020 | _a0125330227 | ||
| 082 | _a538.401 R835 | ||
| 100 | _aROSSNAGEL,S Ed. | ||
| 245 | 0 | _aTHIN FILMS:MODELING OF FILM DEPOSITION FOR MICROELECTRONIC APPLICATIONS | |
| 250 | _a22 | ||
| 260 |
_aSAN DIEGO _bACADEMIC _c1996 |
||
| 300 | _a23X15 | ||
| 942 |
_cBK _2DDC |
||
| 999 |
_c26595 _d26595 |
||