000			00417nam a2200145Ia 4500
008			190711s9999 xx 000 0 und d
020			_a0815514425
082			_a621.38172 S493
100			_aSESHAN, K.
245		0	_aHANDBOOK OF THIN- FILM DEPOSITION PROCESSES AND TECHNIQUES:PRINCIPLES,METHODS,EQ
250			_a2
260			_aNEW YORK _bNoyes Data Corp _c2002
300			_axxviii+629p.,23x15Cm
942			_cBK _2DDC
999			_c29694 _d29694