000 | 00384nam a2200145Ia 4500 | ||
---|---|---|---|
008 | 190711s9999 xx 000 0 und d | ||
020 | _a0849308267 | ||
082 | _a621.381952 M182 | ||
100 | _aMADOU, M.J. | ||
245 | 0 | _aFUNDAMENTALS OF MICROFABRICATION: SCIENCE OF MINIATURIZATION | |
250 | _a2 | ||
260 |
_aBoca Raton _bCRC _c2001 |
||
300 | _a723p.,28X22Cms. | ||
942 |
_cBK _2DDC |
||
999 |
_c30156 _d30156 |