000 00396nam a2200145Ia 4500
008 190711s9999 xx 000 0 und d
020 _a1580535909
082 _a621.381 M257
100 _aMALUF, N.
245 0 _aINTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS ENGINEERING SYSTEMS
250 _a2
260 _aNOORWOOD
_bArtech House
_c2004
300 _axvi+282p.,26X18Cms.
942 _cBK
_2DDC
999 _c30366
_d30366