000 00310nam a2200121Ia 4500
008 190711s9999 xx 000 0 und d
082 _a621.381952 M182
100 _aMADON, M.J.
245 0 _aFUNDAMENTALS OF MICROFABRICATION
260 _aBoca Raton
_bCRC
_c2001
300 _a723p.,28X22Cms
942 _cBK
_2DDC
999 _c30372
_d30372