000 00355nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a3527310800
082 _a621.38175 B817
100 _aBRAND,O
245 0 _aADVANCED MICRO AND NANOSYSTEMS-VOL.2 : CMOS - MEMS
260 _aWEINHEIM
_bWiley
_c2005
300 _axiv+594p.,24X17Cms.
942 _cBK
_2DDC
999 _c30503
_d30503