| 000 | 00341nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 190711s9999 xx 000 0 und d | ||
| 020 | _a0470851066 | ||
| 082 | _a621.3 F818 | ||
| 100 | _aFRANSSILA, S | ||
| 245 | 0 | _aINTRODUCTION TO MICROFABRICATION | |
| 260 |
_aChichester _bWiley _c2004 |
||
| 300 | _axvii+401p., 25X19Cms | ||
| 942 |
_cBK _2DDC |
||
| 999 |
_c30999 _d30999 |
||