000			00346nam a2200133Ia 4500
008			190711s9999 xx 000 0 und d
020			_a0824758242
082			_a621.381 A427
100			_aALLEN, J.J.
245		0	_aMICRO ELECTRO MECHANICAL SYSTEM DESIGN
260			_aBoca Raton _bCRC _c2005
300			_axxiv+465p.,23x16cms.
942			_cBK _2DDC
999			_c31444 _d31444