000 00365nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a0387245200
082 _a620.5 L579
100 _aLEONDES,C.T.
245 0 _aMEMS / NEMS HANDBOOK : TECHNIQUES AND APPLICATIONS - 5 VOLS.
260 _aUSA
_bSpringer
_c2006
300 _axxxv+2088p.,24X16Cms
942 _cBK
_2DDC
999 _c32114
_d32114