000 00393nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a3540346120
082 _a621.381 B391
100 _aBECHTOLD, T. & OTHERS
245 0 _aFAST SIMULATION OF ELECTRO-THERMAL MEMS : EFFICIENT DYNAMIC COMPACT MODELS
260 _aNEW YORK
_bSpringer
_c2007
300 _axi+180p.,24X16Cms.
942 _cBK
_2DDC
999 _c32336
_d32336