000 00382nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a3527314938
082 _a620.1123 L833
100 _aLOHE,D.
245 0 _aMICROENGINEERING OF METALS & CERAMICS,VOL.4: ADVANCED MICRO & NANOSYSTEMS PART 2
260 _aGERMANY
_bWiley
_c2005
300 _axv+644p.,24X17Cms.
942 _cBK
_2DDC
999 _c32405
_d32405