000 00369nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a080044699X
082 _a621.38172 H254
100 _aHARSHA,K.S. S.
245 0 _aPRINCIPLES OF PHYSICAL VAPOR DEPOSITION OF THIN FILMS
260 _aAmsterdam
_bElsevier
_c2006
300 _axi+1160p.,24x16Cms.
942 _cBK
_2DDC
999 _c33921
_d33921