| 000 | 00338nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 190711s9999 xx 000 0 und d | ||
| 020 | _a0824724313 | ||
| 082 | _a621.3 J12 | ||
| 100 | _aJACKSON, M.J | ||
| 245 | 0 | _aMICROFABRICATION AND NANOMANUFACTURING | |
| 260 |
_aBoca Raton _bCRC _c2006 |
||
| 300 | _a401p.,22x16Cms | ||
| 942 |
_cBK _2DDC |
||
| 999 |
_c34192 _d34192 |
||