000 00338nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a1580535364
082 _a621.381 B414
100 _aBEEBY, S.& OTHERS
245 0 _aMEMS MECHANICAL SENSORS
260 _aBoston
_bArtech House
_c2004
300 _ax+269p.,25x18Cms
942 _cBK
_2DDC
999 _c34346
_d34346