000 00350nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a0387368009
082 _a621.81 L797
100 _aLOBONTIU, N.
245 0 _aDYNAMICS OF MICROELECTROMECHANICAL SYSTEMS
260 _aNEW YORK
_bSpringer
_c2007
300 _ax+402p.,24x15CmS.
942 _cBK
_2DDC
999 _c34821
_d34821