000			00373nam a2200133Ia 4500
008			190711s9999 xx 000 0 und d
020			_a1420043761
082			_a621.38171 F594
100			_aFLEETWOOD,D.M. AND OTHERS
245		0	_aDEFECTS IN MICROELECTRONICS MATERIALS AND DEVICES
260			_aBoca Raton _bCRC _c2009
300			_axiii+737p.,26x15Cms.
942			_cBK _2DDC
999			_c35552 _d35552