| 000 | 00354nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 190711s9999 xx 000 0 und d | ||
| 020 | _a0387095103 | ||
| 082 | _a621.381 A219 | ||
| 100 | _aADAMS,T.M. | ||
| 245 | 0 | _aINTRODUCTORY MEMS FABRICATION AND APPLICATION | |
| 260 |
_aNEW YORK _bSpringer _c2010 |
||
| 300 | _axii+444p,.23x15Cms. | ||
| 942 |
_cBK _2DDC |
||
| 999 |
_c37702 _d37702 |
||