| 000 | 00385nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 190711s9999 xx 000 0 und d | ||
| 020 | _a978142005911 | ||
| 082 | _a620.5 P142 | ||
| 100 | _aPAIK, U. | ||
| 245 | 0 | _aNANOPARTICLE ENGINEERING OF CHEMICAL-MECHANICAL PLANARIZATION: FABRICATION OF NE | |
| 260 |
_aBoca Raton _bCRC _c2009 |
||
| 300 | _axiii+191p.,24x16Cms. | ||
| 942 |
_cBK _2DDC |
||
| 999 |
_c38312 _d38312 |
||