| 000 | 00381nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 190711s9999 xx 000 0 und d | ||
| 020 | _a978081551594 | ||
| 082 | _a621.381 L7484 | ||
| 100 | _aLINDROOS, V. & OTHERS | ||
| 245 | 0 | _aHANDBOOK OF SILICON BASED MEMS MATERIALS AND TECHNOLOGY | |
| 260 |
_aBURLINGTON _bElsevier _c2010 |
||
| 300 | _axxxii+636p., 28x22Cm | ||
| 942 |
_cBK _2DDC |
||
| 999 |
_c38971 _d38971 |
||