000 00354nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a978047046634
082 _a621.381 L477
100 _aLEE, K.B.
245 0 _aPRINCIPLES OF MICROELECTROMECHANICAL SYSTEMS
260 _aNew Jersey
_bWiley
_c2011
300 _axii+667p., 24x16Cms.
942 _cBK
_2DDC
999 _c39092
_d39092