000 00359nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a8181288493
082 _a621.81 L797
100 _aLOBONTIU,N.
245 0 _aMECHANICS OF MICROELECTROMECHANICAL SYSTEMS
260 _aNEW DELHI
_bKluwer Academic
_c2005
300 _axi+405p.,23x15Cms.
942 _cBK
_2DDC
999 _c41582
_d41582