| 000 | 00498nam a22001937a 4500 | ||
|---|---|---|---|
| 999 |
_c48544 _d48544 |
||
| 005 | 20200318102555.0 | ||
| 008 | 200318b ||||| |||| 00| 0 eng d | ||
| 020 | _a9780070487093 | ||
| 082 | _a621.381 H87M | ||
| 100 | _aHsu, Tai-Ran. | ||
| 245 | _aMEMS and Microsystems: Design And Manufacture | ||
| 260 |
_aNew Delhi _bMcGraw Hill Education _c2002 |
||
| 300 | _ap.436 | ||
| 650 | _bMiniaturization | ||
| 650 | _bThermofluid | ||
| 650 | _bMicrosystem | ||
| 650 | _bSilicon | ||
| 942 | _cDBK | ||