000			02892nam a22004935i 4500
001			978-3-642-31776-7
003			DE-He213
005			20200420220223.0
007			cr nn 008mamaa
008			120827s2013 gw | s |||| 0|eng d
020			_a9783642317767 _9978-3-642-31776-7
024	7		_a10.1007/978-3-642-31776-7 _2doi
050		4	_aT174.7
072		7	_aTDPB _2bicssc
072		7	_aTEC027000 _2bisacsh
082	0	4	_a620.5 _223
100	1		_aZhang, Yafei. _eauthor.
245	1	0	_aMultilayer Integrated Film Bulk Acoustic Resonators _h[electronic resource] / _cby Yafei Zhang, Da Chen.
264		1	_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg : _bImprint: Springer, _c2013.
300			_aX, 154 p. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
505	0		_aIntroduction -- Propagation of Acoustic Wave in Crystals -- The Theory of FBAR -- The Sputtering Deposition and Etching of AlN Film -- The Membrane Structured FBAR -- Solidly Mounted Acoustic Resonator -- The Application of FBAR in RF Filters -- The FBAR Excited by Lateral Filed -- High Sensitive Sensors Based on FBAR.
520			_aMultilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education's Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang's research group.
650		0	_aEngineering.
650		0	_aSolid state physics.
650		0	_aNanotechnology.
650		0	_aMaterials _xSurfaces.
650		0	_aThin films.
650	1	4	_aEngineering.
650	2	4	_aNanotechnology and Microengineering.
650	2	4	_aSurfaces and Interfaces, Thin Films.
650	2	4	_aSolid State Physics.
700	1		_aChen, Da. _eauthor.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783642317750
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-642-31776-7
912			_aZDB-2-ENG
942			_cEBK
999			_c52016 _d52016