000			03057nam a22005655i 4500
001			978-3-319-23853-1
003			DE-He213
005			20200420221302.0
007			cr nn 008mamaa
008			151222s2016 gw | s |||| 0|eng d
020			_a9783319238531 _9978-3-319-23853-1
024	7		_a10.1007/978-3-319-23853-1 _2doi
050		4	_aT174.7
072		7	_aTDPB _2bicssc
072		7	_aTEC027000 _2bisacsh
082	0	4	_a620.5 _223
245	1	0	_aNanopositioning Technologies _h[electronic resource] : _bFundamentals and Applications / _cedited by Changhai Ru, Xinyu Liu, Yu Sun.
250			_a1st ed. 2016.
264		1	_aCham : _bSpringer International Publishing : _bImprint: Springer, _c2016.
300			_aVI, 409 p. 279 illus., 203 illus. in color. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
505	0		_a1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.
520			_aThis book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
650		0	_aEngineering.
650		0	_aEngineering design.
650		0	_aNanotechnology.
650		0	_aControl engineering.
650		0	_aRobotics.
650		0	_aMechatronics.
650		0	_aElectronics.
650		0	_aMicroelectronics.
650	1	4	_aEngineering.
650	2	4	_aNanotechnology and Microengineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aControl, Robotics, Mechatronics.
650	2	4	_aEngineering Design.
700	1		_aRu, Changhai. _eeditor.
700	1		_aLiu, Xinyu. _eeditor.
700	1		_aSun, Yu. _eeditor.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783319238524
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-319-23853-1
912			_aZDB-2-ENG
942			_cEBK
999			_c53218 _d53218