000 02660nam a22005295i 4500
001 978-3-662-48816-4
003 DE-He213
005 20200421111206.0
007 cr nn 008mamaa
008 151201s2016 gw | s |||| 0|eng d
020 _a9783662488164
_9978-3-662-48816-4
024 7 _a10.1007/978-3-662-48816-4
_2doi
050 4 _aT174.7
072 7 _aTDPB
_2bicssc
072 7 _aTEC027000
_2bisacsh
082 0 4 _a620.5
_223
100 1 _aZhang, Xiao-Sheng.
_eauthor.
245 1 0 _aMicro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
_h[electronic resource] /
_cby Xiao-Sheng Zhang.
264 1 _aBerlin, Heidelberg :
_bSpringer Berlin Heidelberg :
_bImprint: Springer,
_c2016.
300 _aXX, 122 p. 95 illus., 76 illus. in color.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aSpringer Theses, Recognizing Outstanding Ph.D. Research,
_x2190-5053
520 _aThis book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
650 0 _aEngineering.
650 0 _aEnergy harvesting.
650 0 _aBiotechnology.
650 0 _aNanotechnology.
650 0 _aElectronics.
650 0 _aMicroelectronics.
650 1 4 _aEngineering.
650 2 4 _aNanotechnology and Microengineering.
650 2 4 _aMicroengineering.
650 2 4 _aEnergy Harvesting.
650 2 4 _aElectronics and Microelectronics, Instrumentation.
650 2 4 _aNanotechnology.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9783662488140
830 0 _aSpringer Theses, Recognizing Outstanding Ph.D. Research,
_x2190-5053
856 4 0 _uhttp://dx.doi.org/10.1007/978-3-662-48816-4
912 _aZDB-2-ENG
942 _cEBK
999 _c54144
_d54144