000			03571nam a22005055i 4500
001			978-1-4471-5541-6
003			DE-He213
005			20200421111847.0
007			cr nn 008mamaa
008			130923s2014 xxk| s |||| 0|eng d
020			_a9781447155416 _9978-1-4471-5541-6
024	7		_a10.1007/978-1-4471-5541-6 _2doi
050		4	_aT174.7
072		7	_aTDPB _2bicssc
072		7	_aTEC027000 _2bisacsh
082	0	4	_a620.5 _223
100	1		_aSugioka, Koji. _eauthor.
245	1	0	_aFemtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications _h[electronic resource] / _cby Koji Sugioka, Ya Cheng.
264		1	_aLondon : _bSpringer London : _bImprint: Springer, _c2014.
300			_aIX, 129 p. 81 illus., 59 illus. in color. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
490	1		_aSpringerBriefs in Applied Sciences and Technology, _x2191-530X
505	0		_aFundamentals of femtosecond laser processing -- Fabrication of microfluidic structures in glass -- Fabrication of micromechanics -- Fabrication of microoptical components in glass -- Fabrication of microelectronics in glass -- Integration of microcomponents -- Applications of microfluidics and optifluidics fabricated by femtosecond laser -- Summary and outlook.
520			_aFemtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent to the femtosecond laser beam due to nonlinear multiphoton absorption. The multiphoton absorption allows us to perform not only surface but also three-dimensionally internal microfabrication of transparent materials such as glass. This capability makes it possible to directly fabricate three-dimensional microfludics, micromechanics, microelectronics, and microoptics embedded in the glass. Further, these microcomponents can be easily integrated in a single glass microchip by the simple procedure using the femtosecond laser. Thus, the femtosecond laser processing provides some advantages over conventional methods such as traditional semiconductor processing or soft lithography for fabrication of microfludic, optofludic, and lab-on-a-chip devices, and thereby many researches on this topic are currently being carried out. This book presents a comprehensive review on the state of the art and future prospects of femtosecond laser processing for fabrication of microfludics and optofludics including principle of femtosecond laser processing, detailed fabrication procedures of each microcomponent, and practical applications to biochemical analysis.
650		0	_aEngineering.
650		0	_aNanotechnology.
650		0	_aOptical materials.
650		0	_aElectronic materials.
650	1	4	_aEngineering.
650	2	4	_aNanotechnology and Microengineering.
650	2	4	_aOptics, Lasers, Photonics, Optical Devices.
650	2	4	_aOptical and Electronic Materials.
700	1		_aCheng, Ya. _eauthor.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9781447155409
830		0	_aSpringerBriefs in Applied Sciences and Technology, _x2191-530X
856	4	0	_uhttp://dx.doi.org/10.1007/978-1-4471-5541-6
912			_aZDB-2-ENG
942			_cEBK
999			_c55907 _d55907