000 03348nam a22005295i 4500
001 978-1-4614-9320-4
003 DE-He213
005 20200421112043.0
007 cr nn 008mamaa
008 140220s2014 xxu| s |||| 0|eng d
020 _a9781461493204
_9978-1-4614-9320-4
024 7 _a10.1007/978-1-4614-9320-4
_2doi
050 4 _aTK7800-8360
050 4 _aTK7874-7874.9
072 7 _aTJF
_2bicssc
072 7 _aTEC008000
_2bisacsh
072 7 _aTEC008070
_2bisacsh
082 0 4 _a621.381
_223
100 1 _aDemkov, Alexander A.
_eauthor.
245 1 0 _aIntegration of Functional Oxides with Semiconductors
_h[electronic resource] /
_cby Alexander A. Demkov, Agham B. Posadas.
264 1 _aNew York, NY :
_bSpringer New York :
_bImprint: Springer,
_c2014.
300 _aX, 278 p. 146 illus., 113 illus. in color.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
505 0 _aIntroduction -- Critical issues in Oxide-Semiconductor Heteroepitaxy -- Predictive Engineering of Semiconductor-Oxide Interfaces -- Crystalline Functional Oxide Growth Methods -- Thin Oxide Film Characterization Methods -- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy -- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates -- Other Epitaxial Oxides on Semiconductors -- Outlook and Parting Thoughts -- Appendices.
520 _aThis unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges, and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. This book also: �         Discusses why semiconductor substrates are an excellent integration platform for making hybrid logic/sensor devices �         Provides a brief introduction to the methods accessible to non-experts, before going into details of interest to the experts �         Includes a detailed glossary that explains the specialized terminology and provides insight into the terminology and how it's used.
650 0 _aEngineering.
650 0 _aSemiconductors.
650 0 _aElectronics.
650 0 _aMicroelectronics.
650 0 _aOptical materials.
650 0 _aElectronic materials.
650 1 4 _aEngineering.
650 2 4 _aElectronics and Microelectronics, Instrumentation.
650 2 4 _aOptical and Electronic Materials.
650 2 4 _aSemiconductors.
700 1 _aPosadas, Agham B.
_eauthor.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9781461493198
856 4 0 _uhttp://dx.doi.org/10.1007/978-1-4614-9320-4
912 _aZDB-2-ENG
942 _cEBK
999 _c56739
_d56739