000 | 03437nam a22005655i 4500 | ||
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001 | 978-1-4614-8517-9 | ||
003 | DE-He213 | ||
005 | 20200421112043.0 | ||
007 | cr nn 008mamaa | ||
008 | 131030s2013 xxu| s |||| 0|eng d | ||
020 |
_a9781461485179 _9978-1-4614-8517-9 |
||
024 | 7 |
_a10.1007/978-1-4614-8517-9 _2doi |
|
050 | 4 | _aTK7800-8360 | |
050 | 4 | _aTK7874-7874.9 | |
072 | 7 |
_aTJF _2bicssc |
|
072 | 7 |
_aTEC008000 _2bisacsh |
|
072 | 7 |
_aTEC008070 _2bisacsh |
|
082 | 0 | 4 |
_a621.381 _223 |
100 | 1 |
_aDoll, Joseph C. _eauthor. |
|
245 | 1 | 0 |
_aPiezoresistor Design and Applications _h[electronic resource] / _cby Joseph C. Doll, Beth L. Pruitt. |
264 | 1 |
_aNew York, NY : _bSpringer New York : _bImprint: Springer, _c2013. |
|
300 |
_aXI, 245 p. 101 illus., 86 illus. in color. _bonline resource. |
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336 |
_atext _btxt _2rdacontent |
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337 |
_acomputer _bc _2rdamedia |
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338 |
_aonline resource _bcr _2rdacarrier |
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347 |
_atext file _bPDF _2rda |
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490 | 1 |
_aMicrosystems and Nanosystems ; _v1 |
|
505 | 0 | _aIntroduction -- Piezoresistance fundamentals -- Sensitivity, noise and resolution -- Fabrication and process modeling -- Temperature effects -- Design optimization -- Alternative materials and transduction methods. | |
520 | _aThis book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelerometers, pressure sensors, force sensors, chemical sensors and resonators. This book also: �         Demonstrates how the latest piezoresistor models and optimization techniques can be integrated for high performance piezoresistor design �         Covers in detail piezoresistor sensitivity and noise models, signal conditioning, fabrication processes, low-power design and numerical optimization techniques �         Provides an up-to-date discussion of alternative piezoresistive materials and MEMS transduction techniques �         Explores in detail the tradeoffs in size, performance and complexity between piezoresistive sensing and popular alternatives (capacitive, piezoelectric and optical transduction) Piezoresistor Design and Applications addresses all aspects of piezoresistor design, fabrication, modeling and optimization and is an ideal book for MEMS designers, process engineers and researchers. | ||
650 | 0 | _aEngineering. | |
650 | 0 | _aMechanics. | |
650 | 0 | _aMechanics, Applied. | |
650 | 0 | _aElectronics. | |
650 | 0 | _aMicroelectronics. | |
650 | 0 | _aOptical materials. | |
650 | 0 | _aElectronic materials. | |
650 | 1 | 4 | _aEngineering. |
650 | 2 | 4 | _aElectronics and Microelectronics, Instrumentation. |
650 | 2 | 4 | _aOptical and Electronic Materials. |
650 | 2 | 4 | _aTheoretical and Applied Mechanics. |
700 | 1 |
_aPruitt, Beth L. _eauthor. |
|
710 | 2 | _aSpringerLink (Online service) | |
773 | 0 | _tSpringer eBooks | |
776 | 0 | 8 |
_iPrinted edition: _z9781461485162 |
830 | 0 |
_aMicrosystems and Nanosystems ; _v1 |
|
856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/978-1-4614-8517-9 |
912 | _aZDB-2-ENG | ||
942 | _cEBK | ||
999 |
_c56744 _d56744 |