000			03773nam a2200853 i 4500
001			5271223
003			IEEE
005			20200421114116.0
006			m o d
007			cr |n|||||||||
008			100317t20151994njua ob 001 0 eng d
020			_a9780470544273 _qelectronic
020			_z9780780347144 _qprint
020			_z0470544279 _qelectronic
024	7		_a10.1109/9780470544273 _2doi
035			_a(CaBNVSL)mat05271223
035			_a(IDAMS)0b000064810cc99a
040			_aCaBNVSL _beng _erda _cCaBNVSL _dCaBNVSL
050		4	_aTA2020 _b.G75 1994eb
082	0	4	_a621.044 _222
100	1		_aGrill, Alfred, _eauthor.
245	1	0	_aCold plasma in materials fabrication : _bfrom fundamentals to applications / _cAlfred Grill.
264		1	_aPiscataway, New Jersey : _bIEEE Press, _cc1994.
264		2	_a[Piscataqay, New Jersey] : _bIEEE Xplore, _c[1994]
300			_a1 PDF (xiii, 257 pages) : _billustrations.
336			_atext _2rdacontent
337			_aelectronic _2isbdmedia
338			_aonline resource _2rdacarrier
504			_aIncludes bibliographical references and index.
505	0		_a1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching.
506	1		_aRestricted to subscribers or individual electronic text purchasers.
520			_aCold plasma research and development activities, as well as its applications in materials processing have grown enormously in the past decade. Cold Plasma in Materials Fabrication is a comprehensive, up-to-date monograph which presents all aspects of cold, low-pressure plasmas. The eight extensive chapters in this book cover the following topics: . The main parameters and classifications of different types of plasma. Reactions within cold plasmas and between cold plasmas and solid surfaces. State-of-the-art methods for generation and diagnostics of cold plasmas and their application for processing of materials This invaluable reference tool provides a helpful bibliography with suggestions for further reading on each subject. The book will be of importance to manufacturing engineers and scientists, as well as advanced students in engineering, materials, physics, and chemistry programs.
530			_aAlso available in print.
538			_aMode of access: World Wide Web
588			_aDescription based on PDF viewed 12/21/2015.
650		0	_aPlasma engineering.
650		0	_aLow temperature plasmas.
650		0	_aManufacturing processes.
655		0	_aElectronic books.
695			_aAdhesives
695			_aAtomic measurements
695			_aBiographies
695			_aCathodes
695			_aChemical vapor deposition
695			_aChemicals
695			_aDischarges
695			_aElectric fields
695			_aElectrodes
695			_aEtching
695			_aGases
695			_aGlow discharges
695			_aIndexes
695			_aInductors
695			_aIonization
695			_aIons
695			_aNitrogen
695			_aPlasma chemistry
695			_aPlasma diagnostics
695			_aPlasma temperature
695			_aPlasmas
695			_aPlastics
695			_aPolymer films
695			_aPolymers
695			_aRadio frequency
695			_aSpectroscopy
695			_aSubstrates
695			_aSurface cleaning
695			_aSurface treatment
710	2		_aJohn Wiley & Sons, _epublisher.
710	2		_aIEEE Xplore (Online service), _edistributor.
776	0	8	_iPrint version: _z9780780347144
856	4	2	_3Abstract with links to resource _uhttp://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5271223
942			_cEBK
999			_c59545 _d59545