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|---|---|---|---|
| 008 | 190703s9999 xx 000 0 und d | ||
| 020 | _a0-07-048709-X | ||
| 082 | _a621.381 H973 | ||
| 100 | _aHSU, T.R | ||
| 245 | 0 | _aMEMS AND MICROSYSTEMS DESIGN AND MANUFACTURE | |
| 260 |
_aNEW DELHI _bTata McGraw-Hill _c2002 |
||
| 300 | _axii+436p., | ||
| 942 |
_cBB _2DDC |
||
| 999 |
_c6579 _d6579 |
||