| 000 | 00478nam a2200169 4500 | ||
|---|---|---|---|
| 999 |
_c67824 _d67824 |
||
| 005 | 20220526153900.0 | ||
| 008 | 220526b ||||| |||| 00| 0 eng d | ||
| 020 | _a9780070487093 | ||
| 082 | _a621.381 H973 | ||
| 100 |
_aHsu,Tai Ran _93014 |
||
| 245 |
_aMEMS &Microsystems _bDesign and Manufacture |
||
| 260 |
_aNew Delhi _bTata McGraw Hill _c2010 |
||
| 300 | _ap.436 | ||
| 650 |
_bMicrosystem Design _93015 |
||
| 650 |
_bScaling laws in Miniaturization _93016 |
||
| 942 | _cDBK | ||