000 04791cam a2200637Ii 4500
001 on1085348592
003 OCoLC
005 20220711203454.0
006 m o d
007 cr cnu|||unuuu
008 190211s2019 gw ob 001 0 eng d
040 _aN$T
_beng
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015 _aGBB935205
_2bnb
016 7 _a019253713
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019 _a1085592940
_a1104299158
_a1104392774
020 _a9783527818662
_q(electronic bk.)
020 _a3527818669
_q(electronic bk.)
020 _a9783527818655
_q(electronic bk. ;
_qoBook)
020 _a3527818650
_q(electronic bk. ;
_qoBook)
020 _a352734523X
020 _a9783527345236
020 _z9783527345236
029 1 _aAU@
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029 1 _aCHNEW
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029 1 _aCHVBK
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029 1 _aUKMGB
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035 _a(OCoLC)1085348592
_z(OCoLC)1085592940
_z(OCoLC)1104299158
_z(OCoLC)1104392774
037 _a9783527818662
_bWiley
050 4 _aTP159.C3
072 7 _aSCI
_x013060
_2bisacsh
072 7 _aTEC
_x009010
_2bisacsh
082 0 4 _a660.2995
_223
049 _aMAIN
100 1 _aMatsumura, H.
_q(Hideki),
_eauthor.
_98006
245 1 0 _aCatalytic Chemical Vapor Deposition :
_bTechnology and Applications of Cat-CVD /
_cHideki Matsumura and 3 others.
264 1 _aWeinheim, Germany :
_bWiley-VCH,
_c[2019]
300 _a1 online resource
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
505 0 _aFundamentals for Studying the Physics of Cat-CVD and Difference from PECVD -- Fundamentals for Analytical Methods for Revealing Chemical Reactions in Cat-CVD -- Physics and Chemistry of Cat-CVD -- Properties of Inorganic Films Prepared by Cat-CVD -- Organic Polymer Synthesis by Cat-CVD-Related Technology -- Initiated CVD (iCVD) -- Physics and Technologies for Operating Cat-CVD Apparatus -- Application of Cat-CVD Technologies -- Radicals Generated in Cat-CVD Apparatus and Their Application -- Cat-doping: A Novel Low-Temperature Impurity Doping Technology.
504 _aIncludes bibliographical references and index.
588 0 _aOnline resource; title from PDF title page (EBSCO, viewed February 13, 2019).
520 _aThe authoritative reference on catalytic chemical vapor deposition'written by the inventor of the technology This comprehensive book covers a wide scope of Cat-CVD and related technologies'from the fundamentals to the many applications, including the design of a Cat-CVD apparatus. Featuring contributions from four senior leaders in the field'including the father of catalytic chemical vapor deposition'it also introduces some of the techniques used in the observation of Cat-CVD related phenomena so that readers can understand the concepts of such techniques. Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD begins by reviewing the analytical tools for elucidating the chemical reactions in Cat-CVD, such as laser-induced fluorescence and deep ultra-violet absorption, and explains in detail the underlying physics and chemistry of the Cat-CVD technology. Subsequently it provides an overview of the synthesis and properties of Cat-CVD-prepared inorganic and organic thin films. The last parts of this unique book are devoted to the design and operation of Cat-CVD apparatuses and the applications.-Provides coherent coverage of the fundamentals and applications of catalytic chemical vapor deposition (Cat-CVD) -Assembles in one place the state of the art of this rapidly growing field, allowing new researchers to get an overview that is difficult to obtain solely from journal articles -Presents comparisons of different Cat-CVD methods which are usually not found in research papers -Bridges academic and industrial research'showing how CVD can be scaled up from the lab to large-scale industrial utilization in the high-tech industry Catalytic Chemical Vapor Deposition: Technology and Applications is an excellent one-stop resource for researchers and engineers working on or entering the field of Cat-CVD, Hot-Wire CVD, iCVD, and related technologies.
650 0 _aCatalysts.
_98007
650 0 _aChemical vapor deposition.
_98008
650 7 _aSCIENCE
_xChemistry
_xIndustrial & Technical.
_2bisacsh
_95357
650 7 _aTECHNOLOGY & ENGINEERING
_xChemical & Biochemical.
_2bisacsh
_94706
650 7 _aCatalysts.
_2fast
_0(OCoLC)fst00848875
_98007
650 7 _aChemical vapor deposition.
_2fast
_0(OCoLC)fst00853229
_98008
655 4 _aElectronic books.
_93294
776 0 8 _cOriginal
_z352734523X
_z9783527345236
_w(OCoLC)1028165603
856 4 0 _uhttps://doi.org/10.1002/9783527818655
_zWiley Online Library
942 _cEBK
994 _aC0
_bDG1
999 _c68998
_d68998