| 000 | 01509cam a2200433Ki 4500 | ||
|---|---|---|---|
| 001 | on1231983670 | ||
| 003 | OCoLC | ||
| 005 | 20220711203637.0 | ||
| 006 | m o d | ||
| 007 | cr cnu---unuuu | ||
| 008 | 210119s2014 enk o 000 0 eng d | ||
| 040 |
_aDG1 _beng _erda _epn _cDG1 _dOCLCO _dDG1 _dUKAHL |
||
| 020 |
_a9781118696224 _q(electronic bk.) |
||
| 020 |
_a1118696220 _q(electronic bk.) |
||
| 020 | _z9780470061213 | ||
| 020 | _z0470061219 | ||
| 029 | 1 |
_aAU@ _b000068659406 |
|
| 035 | _a(OCoLC)1231983670 | ||
| 050 | 4 | _aTK7871.85 | |
| 082 | 0 | 4 |
_a621.38152 _223 |
| 049 | _aMAIN | ||
| 100 | 1 |
_aCao, Imin, _eauthor. _99581 |
|
| 245 | 1 | 0 |
_aWafer manufacturing : _bshaping of single crystal silicon wafers / _cby Imin Cao, Milind Bhagavat. |
| 264 | 1 |
_aChichester : _bWiley-Blackwell, _c2014. |
|
| 300 | _a1 online resource. | ||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_acomputer _bc _2rdamedia |
||
| 338 |
_aonline resource _bcr _2rdacarrier |
||
| 588 | 0 | _aPrint version record. | |
| 590 | _bWiley Frontlist Obook All English 2021 | ||
| 650 | 0 |
_aSemiconductor wafers. _99582 |
|
| 650 | 7 |
_aSemiconductor wafers. _2fast _0(OCoLC)fst01112189 _99582 |
|
| 655 | 4 |
_aElectronic books. _93294 |
|
| 700 | 1 |
_aBhagavat, Milind, _eauthor. _99583 |
|
| 776 | 0 | 8 |
_iPrint version: _aCao, Imin. _tWafer manufacturing. _dChichester : Wiley-Blackwell, 2014 _z9780470061213 _w(OCoLC)870646559 |
| 856 | 4 | 0 |
_uhttps://doi.org/10.1002/9781118696224 _zWiley Online Library |
| 942 | _cEBK | ||
| 994 |
_a92 _bDG1 |
||
| 999 |
_c69442 _d69442 |
||