| 000 | 01608cam a2200469Mi 4500 | ||
|---|---|---|---|
| 001 | 9780203744307 | ||
| 003 | FlBoTFG | ||
| 005 | 20220711211859.0 | ||
| 006 | m o d | ||
| 007 | cr ||||||||||| | ||
| 008 | 180517s2018 enk o 000 0 eng d | ||
| 040 |
_aOCoLC-P _beng _erda _epn _cOCoLC-P |
||
| 020 |
_a9781351425742 _q(ePub ebook) |
||
| 020 | _a1351425749 | ||
| 020 |
_a9781351425759 _q(PDF ebook) |
||
| 020 |
_a1351425757 _q(PDF ebook) |
||
| 020 |
_a9781351425735 _q(Mobipocket ebook) |
||
| 020 |
_a1351425730 _q(Mobipocket ebook) |
||
| 020 |
_a9780203744307 _q(ebook) |
||
| 020 |
_a0203744306 _q(ebook) |
||
| 024 | 7 |
_a10.1201/9780203744307 _2doi |
|
| 035 | _a(OCoLC)1051975786 | ||
| 035 | _a(OCoLC-P)1051975786 | ||
| 050 | 4 | _aTK7871.85 | |
| 082 | 0 | 4 |
_a621.38152 _223 |
| 100 | 0 |
_aDonovan, _eauthor. _910751 |
|
| 245 | 1 | 0 |
_aParticle control for semiconductor manufacturing / _cedited by R.P. Donovan. |
| 250 | _a1st | ||
| 264 | 1 |
_aLondon : _bRoutledge, _c2018. |
|
| 300 | _a1 online resource | ||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_acomputer _bc _2rdamedia |
||
| 338 |
_aonline resource _bcr _2rdacarrier |
||
| 588 | _aOCLC-licensed vendor bibliographic record. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. _93787 |
|
| 650 | 0 |
_aSemiconductors _xDefects. _910752 |
|
| 650 | 0 |
_aParticles. _910753 |
|
| 700 | 1 |
_aDonovan, R. P., _eeditor. _910754 |
|
| 856 | 4 | 0 |
_3Taylor & Francis _uhttps://www.taylorfrancis.com/books/9780203744307 |
| 856 | 4 | 2 |
_3OCLC metadata license agreement _uhttp://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf |
| 942 | _cEBK | ||
| 999 |
_c69794 _d69794 |
||