000			02015cam a2200313Ii 4500
001			9780429064739
008			180331s2013 fluad obf 001 0 eng d
020			_a9780429064739 _q(e-book : PDF)
020			_z9781439854815 _q(hardback)
024	7		_a10.1201/b13855 _2doi
035			_a(OCoLC)828626471
050		4	_aT50 _b.H268 2013
082	0	4	_a530.8 _bH236
245	0	0	_aHandbook of optical dimensional metrology / _cedited by Kevin Harding.
264		1	_aBoca Raton : _bCRC Press, _c2013.
300			_a1 online resource (xiii, 492 pages)
490	1		_aSeries in optics and optoelectronics
500			_aA Taylor & Francis book.
505	0		_apt. 1. Optical metrology : introduction -- pt. 2. Optical metrology of larger objects -- pt. 3. Optical metrology of medium size objects -- pt. 4. Optical micro-metrology of small objects -- pt. 5. Advanced optical micro-metrology methods.
520			_aThe need for faster and more accurate dimensional measurements has sparked the development of a range of laser types and methods with greater computational power. Featuring contributors from industry and academia, this handbook reviews modern optical dimensional measurement technologies and their applications. Covering scales ranging from nanometers to kilometers, it presents the principles, techniques, and devices used in modern optical dimensional metrology. An essential desk reference for metrologists and engineers, the book incorporates data tables and a multitude of available techniques-- _cProvided by publisher.
650		0	_aMeasurement _vHandbooks, manuals, etc. _911001
650		0	_aOptical measurements _vHandbooks, manuals, etc. _911002
650		0	_aDimensional analysis _vHandbooks, manuals, etc. _911003
700	1		_aHarding, Kevin G. _911004
776	0	8	_iPrint version: _z9781439854815 _w(DLC) 2012038080
830		0	_aSeries in optics and optoelectronics (CRC Press) _911005
856	4	0	_uhttps://www.taylorfrancis.com/books/9781439854822 _zClick here to view.
942			_cEBK
999			_c69848 _d69848