000			02105cam a2200253Ii 4500
001			9780429088797
008			180331s2013 si adf ob 001 0 eng d
020			_a9780429088797 _q(e-book : PDF)
020			_z9789814364560 _q(hardback)
024	7		_a10.1201/b12779 _2doi
035			_a(OCoLC)807782892
050		4	_aTA418.9.N35 _bV57 2013
082	0	4	_a620.5 _bV834
245	0	0	_aVistas in nanofabrication / _cedited by Faiz Rahman.
264		1	_aSingapore : _bPan Stanford Pub., _c2013.
300			_a1 online resource (xiii, 249 pages)
505	0		_a1. Nanosphere lithography for high-density nanopatterning / Hirotaka Oshima -- 2. Dry etching of semiconductors at the nano and micro-scale / S.J. Pearton -- 3. Nanoscale split ring resonator-based metamaterials : fabrication techniques, properties, and applications / Basudev Lahiri. [et al.] -- 4. Nanofabrication technologies for surface texturing of gallium nitride photonic crystal light-emitting diodes / Faiz Rahman. [et al.] -- 5. On-film formation of nanowires : a route to defect-free nanowire growth and device fabrication / Jin-Seo Noh. [et al.] -- 6. Nanotrenches : an optical lithography process for high-aspect-ratio sub-100 nm gaps / Jean-Francois Dayen, Vina Faramarzi, and Bernard Doudin -- 7. High-aspect-ratio metallic nanostructures for transparent electrodes / Joong-Mok Park. [et al.] -- 8. Fabrication of nanogap electrodes by electroless- and electro deposition / Luis De Los Santos Valladares. [et al.] -- 9. Nanometer-scale processing by tribological action and its potential applications / Shojiro Miyake and Mei Wang -- 10. Nanomaterial integration on CMOS platform / Sumita Santra, Prasanta Kumar Guha, and Florin Udrea -- 11. Focused ion beam fabrication of metallic nanostructures / Michal Urbanek and Tomas Sikola -- 12. Nanotechnology showcase.
650		0	_aNanostructured materials. _94537
650		0	_aNanostructures. _95928
700	1		_aRahman, Faiz. _911036
776	0	8	_iPrint version: _z9789814364560
856	4	0	_uhttps://www.taylorfrancis.com/books/9789814364577 _zClick here to view.
942			_cEBK
999			_c69914 _d69914