| 000 | 01871cam a2200337Ii 4500 | ||
|---|---|---|---|
| 001 | 9781482222104 | ||
| 008 | 180331t20152015fluad ob 001 0 eng d | ||
| 020 |
_a9781482222104 _q(e-book : PDF) |
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| 020 |
_z9781482222050 _q(hardback) |
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| 020 |
_z9781138034150 _q(paperback) |
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| 024 | 7 |
_a10.1201/b17322 _2doi |
|
| 035 | _a(OCoLC)887499002 | ||
| 040 |
_aFlBoTFG _cFlBoTFG _erda |
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| 050 | 4 |
_aTA2020 _b.M35 2015 |
|
| 082 | 0 | 4 |
_a621.044 _bM235 |
| 100 | 1 |
_aMakabe, T. _q(Toshiaki), _eauthor. _911978 |
|
| 245 | 1 | 0 |
_aPlasma electronics : _bapplications in microelectronic device fabrication / _cToshiaki Makabe, Zoran Lj. Petrovic. |
| 250 | _aSecond edition. | ||
| 264 | 1 |
_aBoca Raton : _bCRC Press, _c[2015] |
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| 264 | 4 | _c©2015 | |
| 300 | _a1 online resource | ||
| 336 |
_atext _2rdacontent |
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| 337 |
_acomputer _2rdamedia |
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| 338 |
_aonline resource _2rdacarrier |
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| 505 | 0 | _achapter 1. Introduction -- chapter 2. Phenomenological description of the charged particle transport -- chapter 3. Macroscopic plasma characteristics -- chapter 4. Elementary processes in gas phase and on surfaces -- chapter 5. The Boltzmann equation and transport equations of charged particles -- chapter 6. General properties of charged particle transport in gases -- chapter 7. Modeling of nonequilibrium (low temperature) plasmas -- chapter 8. Numerical procedure of modeling -- chapter 9. Capacitively coupled plasma -- chapter 10. Inductively coupled plasma -- chapter 11. Magnetically enhanced plasma -- chapter 12. Plasma processing and related topics -- chapter 13. Atmospheric-pressure, low-temperature plasma. | |
| 650 | 0 |
_aPlasma engineering. _911979 |
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| 700 | 1 |
_aPetrovic, Z., _eauthor. _911980 |
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| 776 | 0 | 8 |
_iPrint version: _z9781482222050 _w(DLC) 2014016456 |
| 856 | 4 | 0 |
_uhttps://www.taylorfrancis.com/books/9781482222104 _zClick here to view. |
| 942 | _cEBK | ||
| 999 |
_c70114 _d70114 |
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