| 000 | 03025cam a22005051i 4500 | ||
|---|---|---|---|
| 001 | 9781003178583 | ||
| 003 | FlBoTFG | ||
| 005 | 20220711212503.0 | ||
| 006 | m d | ||
| 007 | cr ||||||||||| | ||
| 008 | 210209s2021 flua o 000 0 eng d | ||
| 040 |
_aOCoLC-P _beng _erda _epn _cOCoLC-P |
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| 020 |
_a9781000396447 _q(ePub ebook) |
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| 020 | _a1000396444 | ||
| 020 |
_a9781000396409 _q(PDF ebook) |
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| 020 | _a1000396401 | ||
| 020 |
_a9781003178583 _q(ebook) |
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| 020 | _a1003178588 | ||
| 020 | _z9781032014296 (hbk.) | ||
| 024 | 7 |
_a10.1201/9781003178583 _2doi |
|
| 035 | _a(OCoLC)1246513110 | ||
| 035 | _a(OCoLC-P)1246513110 | ||
| 050 | 4 | _aTK7874 | |
| 072 | 7 |
_aTEC _x008020 _2bisacsh |
|
| 072 | 7 |
_aTJFC _2bicssc |
|
| 082 | 0 | 4 |
_a621.3815 _223 |
| 100 | 1 |
_aShubham, Kumar, _eauthor. _916955 |
|
| 245 | 1 | 0 |
_aIntegrated circuit fabrication / _cKumar Shubham, Ankaj Gupta. |
| 250 | _a1st. | ||
| 264 | 1 |
_aBoca Raton : _bCRC Press, _c2021. |
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| 300 |
_a1 online resource : _billustrations (black and white) |
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| 336 |
_atext _2rdacontent |
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| 336 |
_astill image _2rdacontent |
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| 337 |
_acomputer _2rdamedia |
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| 338 |
_aonline resource _2rdacarrier |
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| 500 | _a1. Introduction to Silicon Wafer Processing 2. Epitaxy 3. Oxidation 4. Lithography 5. Etching 6. Diffusion 7. Ion Implantation 8. Film Deposition: Dielectric, Polysilicon and Metallization 9. Packaging 10. VLSI Process Integration. | ||
| 520 | _aThis book covers theoretical and practical aspects of all major steps in the fabrication sequence. This book can be used conveniently in a semester length course on integrated circuit fabrication. This text can also serve as a reference for practicing engineer and scientist in the semiconductor industry. IC Fabrication are ever demanding of technology in rapidly growing industry growth opportunities are numerous. A recent survey shows that integrated circuit currently outnumber humans in UK, USA, India and China. The spectacular advances in the development and application of integrated circuit technology have led to the emergence of microelectronic process engineering as an independent discipline. Integrated circuit fabrication text books typically divide the fabrication sequence into a number of unit processes that are repeated to form the integrated circuit. The effect is to give the book an analysis flavor: a number of loosely related topics each with its own background material.Note: T& F does not sell or distribute the Hardback in India, Pakistan, Nepal, Bhutan, Bangladesh and Sri Lanka. | ||
| 588 | _aOCLC-licensed vendor bibliographic record. | ||
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. _97630 |
|
| 650 | 7 |
_aTECHNOLOGY / Electronics / Circuits / Integrated _2bisacsh _916956 |
|
| 700 | 1 |
_aGupta, Ankaj, _eauthor. _916957 |
|
| 856 | 4 | 0 |
_3Taylor & Francis _uhttps://www.taylorfrancis.com/books/9781003178583 |
| 856 | 4 | 2 |
_3OCLC metadata license agreement _uhttp://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf |
| 942 | _cEBK | ||
| 999 |
_c71388 _d71388 |
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