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001 9780429186738
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040 _aOCoLC-P
_beng
_erda
_epn
_cOCoLC-P
020 _a9780429186738
_q(electronic bk.)
020 _a0429186738
_q(electronic bk.)
020 _a9780429547355
_q(electronic bk. : Mobipocket)
020 _a0429547358
_q(electronic bk. : Mobipocket)
020 _a9780429532658
_q(electronic bk. : EPUB)
020 _a0429532652
_q(electronic bk. : EPUB)
020 _a9781498779500
_q(electronic bk. : PDF)
020 _a1498779506
_q(electronic bk. : PDF)
020 _z9781498779470
024 8 _a10.1201/9780429186738
_2doi
035 _a(OCoLC)1105556886
035 _a(OCoLC-P)1105556886
050 4 _aTK7874.58
072 7 _aTEC
_x009060
_2bisacsh
072 7 _aTEC
_x018000
_2bisacsh
072 7 _aTEC
_x020000
_2bisacsh
072 7 _aTEC
_x040000
_2bisacsh
082 0 4 _a670.42/5
_223
245 0 0 _aOptical inspection of microsystems /
_cedited by Wolfgang Osten.
250 _aSecond edition.
264 1 _aBoca Raton, FL :
_bCRC Press/Taylor & Francis Group,
_c[2020]
264 4 _c©2020
300 _a1 online resource :
_billustrations
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
520 _aWhere conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book: Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems; Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques; Offers numerous practical examples and illustrations; Includes calibration of optical measurement systems for the inspection of MEMS; Presents the characterization of dynamics of MEMS.
588 _aOCLC-licensed vendor bibliographic record.
650 0 _aMicroelectromechanical systems
_xInspection.
_918937
650 0 _aQuality control
_xOptical methods.
_918938
650 0 _aOptical measurements.
_913953
650 0 _aIndustrial microscopy.
_918939
650 7 _aTECHNOLOGY & ENGINEERING / Industrial Engineering.
_2bisacsh
_99235
650 7 _aTECHNOLOGY & ENGINEERING / Industrial Technology.
_2bisacsh
_911541
650 7 _aTECHNOLOGY & ENGINEERING / Manufacturing.
_2bisacsh
_911542
650 7 _aTECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades.
_2bisacsh
_95059
700 1 _aOsten, Wolfgang,
_eeditor.
_918940
856 4 0 _3Taylor & Francis
_uhttps://www.taylorfrancis.com/books/9780429186738
856 4 2 _3OCLC metadata license agreement
_uhttp://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf
942 _cEBK
999 _c71972
_d71972