| 000 | 01710cam a2200361Ii 4500 | ||
|---|---|---|---|
| 001 | 9781315364926 | ||
| 008 | 180331t20172017si ad ob 001 0 eng d | ||
| 020 |
_a9781315364926 _q(e-book : PDF) |
||
| 020 |
_a9789814613736 _q(e-book: PDF) |
||
| 020 |
_a9781315322308 _q(e-book: Mobi) |
||
| 020 |
_z9789814613729 _q(hardback) |
||
| 024 | 7 |
_a10.1201/9781315364926 _2doi |
|
| 035 | _a(OCoLC)982121322 | ||
| 040 |
_aFlBoTFG _cFlBoTFG _erda |
||
| 050 | 4 |
_aTK7875 _b.P35 2017 |
|
| 082 | 0 | 4 |
_a621.381 _bP153 |
| 100 | 1 |
_aPal, Prem, _eauthor. _920120 |
|
| 245 | 1 | 0 |
_aSilicon wet bulk micromachining for MEMS / _cPrem Pal, Kazuo Sato. |
| 246 | 3 | _aSilicon wet bulk micromachining for microelectromechanical systems | |
| 264 | 1 |
_aSingapore : _bPan Stanford Publishing Pte. Ltd., _c[2017] |
|
| 264 | 4 | _c©2017 | |
| 300 | _a1 online resource | ||
| 336 |
_atext _2rdacontent |
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| 337 |
_acomputer _2rdamedia |
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| 338 |
_aonline resource _2rdacarrier |
||
| 505 | 0 | _a1. A brief introduction of the crystal structure -- 2. Brief overview of silicon wafer manufacturing and microfabrication techniques -- 3. Isotropic etching of silicon and related materials -- 4. KOH-based anisotropic etching -- 5. TMAH-based anisotropic etching -- 6. Convex and concave corners in silicon wet bulk micromachining -- 7. Alignment of mask patterns to crystallographic directions -- 8. Simple to complex structures using wet bulk micromachining. | |
| 650 | 0 |
_aMicroelectromechanical systems. _96063 |
|
| 650 | 0 |
_aMicromachining. _912531 |
|
| 700 | 1 |
_aSato, Kazuo, _eauthor. _920121 |
|
| 776 | 0 | 8 |
_iPrint version: _z9789814613729 |
| 856 | 4 | 0 |
_uhttps://www.taylorfrancis.com/books/9781315364926 _zClick here to view. |
| 942 | _cEBK | ||
| 999 |
_c72292 _d72292 |
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