000			01841nmm a2200361 a 4500
001			00006123
003			WSP
005			20220711214122.0
007			cr |uu|||uu|||
008			181204s2008 si a ob 001 0 eng d
010			_z 2008299033
040			_aWSPC _beng _cWSPC
020			_a9789812790958 _q(ebook)
020			_z9789812568236 _q(hbk.)
050	0	4	_aTK7871.85 _b.Y66 2008
072		7	_aTEC _x009030 _2bisacsh
082	0	4	_a621.38152 _223
100	1		_aYoo, Chue San. _93786
245	1	0	_aSemiconductor manufacturing technology _h[electronic resource] / _cChue San Yoo.
260			_aSingapore : _bWorld Scientific Publishing Co. Pte Ltd., _c©2008.
300			_a1 online resource (484 p.) : _bill.
490	1		_aAdvanced series in electrical and computer engineering ; _vv. 13
538			_aMode of access: World Wide Web.
538			_aSystem requirements: Adobe Acrobat Reader.
588			_aTitle from web page (viewed December 4, 2018).
504			_aIncludes bibliographical references and index.
520			_a"This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format."--Publisher's website.
650		0	_aSemiconductors _xDesign and construction. _93787
650		0	_aSemiconductor industry. _93788
650		0	_aElectronic books. _920670
856	4	0	_uhttps://www.worldscientific.com/worldscibooks/10.1142/6123#t=toc _zAccess to full text is restricted to subscribers.
942			_cEBK
999			_c72521 _d72521