| 000 | 04444nam a2201237 i 4500 | ||
|---|---|---|---|
| 001 | 5273520 | ||
| 003 | IEEE | ||
| 005 | 20220712205717.0 | ||
| 006 | m o d | ||
| 007 | cr |n||||||||| | ||
| 008 | 151221s1997 nyua ob 001 eng d | ||
| 020 |
_a9780470545263 _qelectronic |
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| 020 |
_z9780780310858 _qprint |
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| 020 |
_z0470545267 _qelectronic |
||
| 024 | 7 |
_a10.1109/9780470545263 _2doi |
|
| 035 | _a(CaBNVSL)mat05273520 | ||
| 035 | _a(IDAMS)0b000064810d107e | ||
| 040 |
_aCaBNVSL _beng _erda _cCaBNVSL _dCaBNVSL |
||
| 050 | 4 |
_aTK7874 _b.M4876 1997eb |
|
| 082 | 0 | 4 |
_a621.381 _222 |
| 245 | 0 | 0 |
_aMicromechanics and MEMS : _bclassic and seminal papers to 1990 / _cedited by William S. Trimmer. |
| 264 | 1 |
_aNew York : _bIEEE Press, _c1997. |
|
| 264 | 2 |
_a[Piscataqay, New Jersey] : _bIEEE Xplore, _c[1997] |
|
| 300 |
_a1 PDF (xv, 701 pages) : _billustrations. |
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| 336 |
_atext _2rdacontent |
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| 337 |
_aelectronic _2isbdmedia |
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| 338 |
_aonline resource _2rdacarrier |
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| 500 | _a"A selected reprint volume." | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 505 | 0 | _aEarly papers in micromechanics -- Side drive actuators -- Comb drive actuators -- Electrostatic actuators -- Magnetic actuators -- Harmonic motors -- Other actuators : Thermal ; Shape memory alloy ; Impact ; Piezoelectric -- Values and pumps -- Fluidics -- Surface micromachining -- Bulk micromachining -- LIGA -- Computer aided design -- Metrology. | |
| 506 | 1 | _aRestricted to subscribers or individual electronic text purchasers. | |
| 520 | _aMicromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. | ||
| 530 | _aAlso available in print. | ||
| 538 | _aMode of access: World Wide Web | ||
| 588 | _aDescription based on PDF viewed 12/21/2015. | ||
| 650 | 0 |
_aMicroelectronics. _93783 |
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| 650 | 0 |
_aMicroelectromechanical systems. _96063 |
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| 650 | 0 |
_aActuators. _96032 |
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| 655 | 0 |
_aElectronic books. _93294 |
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| 695 | _aAccuracy | ||
| 695 | _aActuators | ||
| 695 | _aAdhesives | ||
| 695 | _aAnnealing | ||
| 695 | _aBiographies | ||
| 695 | _aBiology | ||
| 695 | _aBiomembranes | ||
| 695 | _aBridges | ||
| 695 | _aCavity resonators | ||
| 695 | _aComputers | ||
| 695 | _aElectric fields | ||
| 695 | _aElectrodes | ||
| 695 | _aElectron microscopy | ||
| 695 | _aElectrostatic actuators | ||
| 695 | _aElectrostatics | ||
| 695 | _aEtching | ||
| 695 | _aFabrication | ||
| 695 | _aFilms | ||
| 695 | _aFingers | ||
| 695 | _aFluidics | ||
| 695 | _aFluids | ||
| 695 | _aForce | ||
| 695 | _aGears | ||
| 695 | _aGold | ||
| 695 | _aHarmonic analysis | ||
| 695 | _aHeating | ||
| 695 | _aIndexes | ||
| 695 | _aInsulation | ||
| 695 | _aIntegrated circuit modeling | ||
| 695 | _aMagnetic cores | ||
| 695 | _aMagnetic levitation | ||
| 695 | _aManipulators | ||
| 695 | _aMaterials | ||
| 695 | _aMathematical model | ||
| 695 | _aMetals | ||
| 695 | _aMicrostructure | ||
| 695 | _aOptical sensors | ||
| 695 | _aPolymers | ||
| 695 | _aQ factor | ||
| 695 | _aResistance | ||
| 695 | _aResists | ||
| 695 | _aRotors | ||
| 695 | _aSemiconductor process modeling | ||
| 695 | _aSensors | ||
| 695 | _aShafts | ||
| 695 | _aSilicon | ||
| 695 | _aSolid modeling | ||
| 695 | _aSprings | ||
| 695 | _aStators | ||
| 695 | _aStrain | ||
| 695 | _aStructural beams | ||
| 695 | _aSubstrates | ||
| 695 | _aSuperconducting magnets | ||
| 695 | _aSuspensions | ||
| 695 | _aSynchronous motors | ||
| 695 | _aTorque | ||
| 695 | _aValves | ||
| 695 | _aWire | ||
| 695 | _aWriting | ||
| 700 | 1 |
_aTrimmer, W. _927193 |
|
| 710 | 2 |
_aJohn Wiley & Sons, _epublisher. _96902 |
|
| 710 | 2 |
_aInstitute of Electrical and Electronics Engineers. _99191 |
|
| 710 | 2 |
_aIEEE Xplore (Online service), _edistributor. _927194 |
|
| 776 | 0 | 8 |
_iPrint version: _z9780780310858 |
| 856 | 4 | 2 |
_3Abstract with links to resource _uhttps://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520 |
| 942 | _cEBK | ||
| 999 |
_c73993 _d73993 |
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