000 03576nam a22005655i 4500
001 978-3-030-40560-1
003 DE-He213
005 20220801213921.0
007 cr nn 008mamaa
008 200409s2020 sz | s |||| 0|eng d
020 _a9783030405601
_9978-3-030-40560-1
024 7 _a10.1007/978-3-030-40560-1
_2doi
050 4 _aTK7875
072 7 _aTJF
_2bicssc
072 7 _aTEC027000
_2bisacsh
072 7 _aTJF
_2thema
082 0 4 _a621.381
_223
100 1 _aHuff, Michael.
_eauthor.
_4aut
_4http://id.loc.gov/vocabulary/relators/aut
_935196
245 1 0 _aProcess Variations in Microsystems Manufacturing
_h[electronic resource] /
_cby Michael Huff.
250 _a1st ed. 2020.
264 1 _aCham :
_bSpringer International Publishing :
_bImprint: Springer,
_c2020.
300 _aXIX, 521 p. 236 illus., 24 illus. in color.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aMicrosystems and Nanosystems,
_x2198-0071
505 0 _aIntroduction -- Overview of Microsystems Manufacturing -- Process Variations in Microsystems Processing Steps -- Microsystems Metrology Methods and Associated Errors -- Process Integration and Variations in Material Properties -- Device Parameter Variations in Microsystems Manufacturing -- Quality Assurance and Control Methods Used in Microsystems Manufacturing -- Design Methods for Handling Process Variations -- Future Methods for Improved Microsystems Manufacturing Process Variations.
520 _aThis book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level. Examines and explains the basic processing steps used in MEMS fabrication; Illustrates best practices and lessons learned in manufacturing of microsystems for commercial products with detailed case studies; Reviews future methods that may provide for improved process variations.
650 0 _aMicrotechnology.
_928219
650 0 _aMicroelectromechanical systems.
_96063
650 0 _aManufactures.
_931642
650 0 _aNanotechnology.
_94707
650 0 _aElectronic circuits.
_919581
650 1 4 _aMicrosystems and MEMS.
_935197
650 2 4 _aMachines, Tools, Processes.
_931645
650 2 4 _aNanotechnology.
_94707
650 2 4 _aElectronic Circuits and Systems.
_935198
710 2 _aSpringerLink (Online service)
_935199
773 0 _tSpringer Nature eBook
776 0 8 _iPrinted edition:
_z9783030405588
776 0 8 _iPrinted edition:
_z9783030405595
830 0 _aMicrosystems and Nanosystems,
_x2198-0071
_935200
856 4 0 _uhttps://doi.org/10.1007/978-3-030-40560-1
912 _aZDB-2-ENG
912 _aZDB-2-SXE
942 _cEBK
999 _c75748
_d75748