| 000 | 02692nam a22005415i 4500 | ||
|---|---|---|---|
| 001 | 978-3-030-58908-0 | ||
| 003 | DE-He213 | ||
| 005 | 20220801215614.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 201118s2021 sz | s |||| 0|eng d | ||
| 020 |
_a9783030589080 _9978-3-030-58908-0 |
||
| 024 | 7 |
_a10.1007/978-3-030-58908-0 _2doi |
|
| 050 | 4 | _aTK7875 | |
| 072 | 7 |
_aTJF _2bicssc |
|
| 072 | 7 |
_aTEC027000 _2bisacsh |
|
| 072 | 7 |
_aTJF _2thema |
|
| 082 | 0 | 4 |
_a621.381 _223 |
| 100 | 1 |
_aPoletkin, Kirill. _eauthor. _0(orcid)0000-0002-9711-7517 _1https://orcid.org/0000-0002-9711-7517 _4aut _4http://id.loc.gov/vocabulary/relators/aut _945367 |
|
| 245 | 1 | 0 |
_aLevitation Micro-Systems _h[electronic resource] : _bApplications to Sensors and Actuators / _cby Kirill Poletkin. |
| 250 | _a1st ed. 2021. | ||
| 264 | 1 |
_aCham : _bSpringer International Publishing : _bImprint: Springer, _c2021. |
|
| 300 |
_aIX, 174 p. 93 illus., 91 illus. in color. _bonline resource. |
||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_acomputer _bc _2rdamedia |
||
| 338 |
_aonline resource _bcr _2rdacarrier |
||
| 347 |
_atext file _bPDF _2rda |
||
| 490 | 1 |
_aMicrosystems and Nanosystems, _x2198-0071 |
|
| 505 | 0 | _aIntroduction to levitation micro-systems -- Micro-fabrication techniques -- Analytical modelling -- Quasi-finite element modelling -- Inductive levitation micro-systems -- Hybrid levitation micro-systems -- Mechanical thermal noise in levitated micro-gyroscopes. | |
| 520 | _aThis book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements. | ||
| 650 | 0 |
_aMicrotechnology. _928219 |
|
| 650 | 0 |
_aMicroelectromechanical systems. _96063 |
|
| 650 | 0 |
_aMaterials. _97549 |
|
| 650 | 0 |
_aDetectors. _96969 |
|
| 650 | 1 | 4 |
_aMicrosystems and MEMS. _945368 |
| 650 | 2 | 4 |
_aSensors and biosensors. _945369 |
| 710 | 2 |
_aSpringerLink (Online service) _945370 |
|
| 773 | 0 | _tSpringer Nature eBook | |
| 776 | 0 | 8 |
_iPrinted edition: _z9783030589073 |
| 776 | 0 | 8 |
_iPrinted edition: _z9783030589097 |
| 776 | 0 | 8 |
_iPrinted edition: _z9783030589103 |
| 830 | 0 |
_aMicrosystems and Nanosystems, _x2198-0071 _945371 |
|
| 856 | 4 | 0 | _uhttps://doi.org/10.1007/978-3-030-58908-0 |
| 912 | _aZDB-2-ENG | ||
| 912 | _aZDB-2-SXE | ||
| 942 | _cEBK | ||
| 999 |
_c77669 _d77669 |
||