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020 _a9783319224589
_9978-3-319-22458-9
024 7 _a10.1007/978-3-319-22458-9
_2doi
050 4 _aTK7875
072 7 _aTJF
_2bicssc
072 7 _aTEC027000
_2bisacsh
072 7 _aTJF
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082 0 4 _a621.381
_223
245 1 0 _aMEMS and Nanotechnology, Volume 5
_h[electronic resource] :
_bProceedings of the 2015 Annual Conference on Experimental and Applied Mechanics /
_cedited by Barton C. Prorok, LaVern Starman.
250 _a1st ed. 2016.
264 1 _aCham :
_bSpringer International Publishing :
_bImprint: Springer,
_c2016.
300 _aVII, 108 p. 98 illus., 47 illus. in color.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aConference Proceedings of the Society for Experimental Mechanics Series,
_x2191-5652
505 0 _aFrom the Contents: Oxide Driven Strength Degradation of (1 1 1) Silicon Surfaces -- Keynote: In situ TEM Nanomechanical Testing -- Poisson's Ratio as a Damage Index Sensed By Dual-embedded Fiber Bragg Grating Sensor -- In Situ High-Rate Mechanical Testing in the Dynamic Transmission Electron Microscope.
520 _aThe 16thInternational Symposium on MEMS and Nanotechnology, Volume 5 of the Proceedings of the 2015SEM Annual Conference& Exposition on Experimental and Applied Mechanics, the fifth volume of nine from the Conference, brings together contributions to this important area of research and engineering.  The collection presents early findings and case studies on a wide range of areas, including: Microscale and Microstructural Effects on Mechanical Behavior Dynamic Micro/Nanomechanics In-situ Techniques Mechanics of Graphene Indentation and Small Scale Testing MEMS.
650 0 _aMicrotechnology.
_928219
650 0 _aMicroelectromechanical systems.
_96063
650 0 _aMechanics, Applied.
_93253
650 0 _aSolids.
_93750
650 1 4 _aMicrosystems and MEMS.
_953106
650 2 4 _aSolid Mechanics.
_931612
700 1 _aProrok, Barton C.
_eeditor.
_4edt
_4http://id.loc.gov/vocabulary/relators/edt
_953107
700 1 _aStarman, LaVern.
_eeditor.
_4edt
_4http://id.loc.gov/vocabulary/relators/edt
_953108
710 2 _aSpringerLink (Online service)
_953109
773 0 _tSpringer Nature eBook
776 0 8 _iPrinted edition:
_z9783319224572
776 0 8 _iPrinted edition:
_z9783319224596
776 0 8 _iPrinted edition:
_z9783319370439
830 0 _aConference Proceedings of the Society for Experimental Mechanics Series,
_x2191-5652
_953110
856 4 0 _uhttps://doi.org/10.1007/978-3-319-22458-9
912 _aZDB-2-ENG
912 _aZDB-2-SXE
942 _cEBK
999 _c79086
_d79086