| 000 | 03294nam a22005415i 4500 | ||
|---|---|---|---|
| 001 | 978-3-319-50824-5 | ||
| 003 | DE-He213 | ||
| 005 | 20220801222259.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 170222s2017 sz | s |||| 0|eng d | ||
| 020 |
_a9783319508245 _9978-3-319-50824-5 |
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| 024 | 7 |
_a10.1007/978-3-319-50824-5 _2doi |
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| 050 | 4 | _aTK7867-7867.5 | |
| 072 | 7 |
_aTJFC _2bicssc |
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_aTEC008010 _2bisacsh |
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| 072 | 7 |
_aTJFC _2thema |
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| 082 | 0 | 4 |
_a621.3815 _223 |
| 245 | 1 | 0 |
_aOutlook and Challenges of Nano Devices, Sensors, and MEMS _h[electronic resource] / _cedited by Ting Li, Ziv Liu. |
| 250 | _a1st ed. 2017. | ||
| 264 | 1 |
_aCham : _bSpringer International Publishing : _bImprint: Springer, _c2017. |
|
| 300 |
_aXVI, 521 p. 367 illus., 272 illus. in color. _bonline resource. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_acomputer _bc _2rdamedia |
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| 338 |
_aonline resource _bcr _2rdacarrier |
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| 347 |
_atext file _bPDF _2rda |
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| 505 | 0 | _aIntroduction -- High-k dielectric for nanoscale MOS devices -- Performance, optimization, and reliability of FinFET devices -- Performance, optimization, and challenges of emerging nanowire field-effect transistors -- Graphene technology for future MEMS and sensor applications -- Nanoscale sensors for next-generation optical transceiver applications -- Nanoscale MEMS for future optical communication applications -- Nanoscale devices for biomedical applications -- Effect of nanoscale structure on reliability of nano devices and sensors -- Compact modeling of nano devices and sensors -- Three-dimensional TCAD simulation of nano semiconductor devices -- Fabrication of nano devices based on novel material -- Novel processing technology for fabricating nano devices and sensors -- Conclusions. | |
| 520 | _aThis book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward. | ||
| 650 | 0 |
_aElectronic circuits. _919581 |
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| 650 | 0 |
_aMicrotechnology. _928219 |
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| 650 | 0 |
_aMicroelectromechanical systems. _96063 |
|
| 650 | 0 |
_aNanotechnology. _94707 |
|
| 650 | 1 | 4 |
_aElectronic Circuits and Systems. _960654 |
| 650 | 2 | 4 |
_aMicrosystems and MEMS. _960655 |
| 650 | 2 | 4 |
_aNanotechnology. _94707 |
| 700 | 1 |
_aLi, Ting. _eeditor. _4edt _4http://id.loc.gov/vocabulary/relators/edt _960656 |
|
| 700 | 1 |
_aLiu, Ziv. _eeditor. _4edt _4http://id.loc.gov/vocabulary/relators/edt _960657 |
|
| 710 | 2 |
_aSpringerLink (Online service) _960658 |
|
| 773 | 0 | _tSpringer Nature eBook | |
| 776 | 0 | 8 |
_iPrinted edition: _z9783319508221 |
| 776 | 0 | 8 |
_iPrinted edition: _z9783319508238 |
| 776 | 0 | 8 |
_iPrinted edition: _z9783319845005 |
| 856 | 4 | 0 | _uhttps://doi.org/10.1007/978-3-319-50824-5 |
| 912 | _aZDB-2-ENG | ||
| 912 | _aZDB-2-SXE | ||
| 942 | _cEBK | ||
| 999 |
_c80594 _d80594 |
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