| 000 | 02865nam a22005775i 4500 | ||
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| 001 | 978-981-10-6165-3 | ||
| 003 | DE-He213 | ||
| 005 | 20220801222552.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 170908s2018 si | s |||| 0|eng d | ||
| 020 |
_a9789811061653 _9978-981-10-6165-3 |
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| 024 | 7 |
_a10.1007/978-981-10-6165-3 _2doi |
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| 050 | 4 | _aTS1-2301 | |
| 072 | 7 |
_aTGP _2bicssc |
|
| 072 | 7 |
_aTEC020000 _2bisacsh |
|
| 072 | 7 |
_aTGP _2thema |
|
| 082 | 0 | 4 |
_a670 _223 |
| 100 | 1 |
_aCheng, Jie. _eauthor. _4aut _4http://id.loc.gov/vocabulary/relators/aut _962180 |
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| 245 | 1 | 0 |
_aResearch on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnect _h[electronic resource] / _cby Jie Cheng. |
| 250 | _a1st ed. 2018. | ||
| 264 | 1 |
_aSingapore : _bSpringer Nature Singapore : _bImprint: Springer, _c2018. |
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| 300 |
_aXVIII, 137 p. 103 illus. _bonline resource. |
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_atext _btxt _2rdacontent |
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_acomputer _bc _2rdamedia |
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_aonline resource _bcr _2rdacarrier |
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_atext file _bPDF _2rda |
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| 490 | 1 |
_aSpringer Theses, Recognizing Outstanding Ph.D. Research, _x2190-5061 |
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| 520 | _aThis thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material. Pursuing a systematic approach to resolve the remaining critical issues in the CMP, it first investigates the tribocorrosion properties and the material removal mechanisms of copper (Cu) and Ru in KIO4-based slurry. The thesis subsequently studies Cu/Ru galvanic corrosion from a new micro and in-situ perspective, and on this basis, seeks ways to mitigate corrosion using different slurry additives. The findings presented here constitute a significant advance in fundamental and technical investigations into the CMP, while also laying the groundwork for future research. | ||
| 650 | 0 |
_aManufactures. _931642 |
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| 650 | 0 |
_aCoatings. _96797 |
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| 650 | 0 |
_aTribology. _94149 |
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| 650 | 0 |
_aCorrosion and anti-corrosives. _96457 |
|
| 650 | 0 |
_aElectronics. _93425 |
|
| 650 | 1 | 4 |
_aMachines, Tools, Processes. _931645 |
| 650 | 2 | 4 |
_aCoatings. _96797 |
| 650 | 2 | 4 |
_aTribology. _94149 |
| 650 | 2 | 4 |
_aCorrosion. _916286 |
| 650 | 2 | 4 |
_aElectronics and Microelectronics, Instrumentation. _932249 |
| 710 | 2 |
_aSpringerLink (Online service) _962181 |
|
| 773 | 0 | _tSpringer Nature eBook | |
| 776 | 0 | 8 |
_iPrinted edition: _z9789811061646 |
| 776 | 0 | 8 |
_iPrinted edition: _z9789811061660 |
| 776 | 0 | 8 |
_iPrinted edition: _z9789811355851 |
| 830 | 0 |
_aSpringer Theses, Recognizing Outstanding Ph.D. Research, _x2190-5061 _962182 |
|
| 856 | 4 | 0 | _uhttps://doi.org/10.1007/978-981-10-6165-3 |
| 912 | _aZDB-2-ENG | ||
| 912 | _aZDB-2-SXE | ||
| 942 | _cEBK | ||
| 999 |
_c80915 _d80915 |
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