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001 978-3-319-28688-4
003 DE-He213
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008 170110s2017 sz | s |||| 0|eng d
020 _a9783319286884
_9978-3-319-28688-4
024 7 _a10.1007/978-3-319-28688-4
_2doi
050 4 _aTK7800-8360
072 7 _aTJF
_2bicssc
072 7 _aTEC008000
_2bisacsh
072 7 _aTJF
_2thema
082 0 4 _a621.381
_223
245 1 0 _aPiezoelectric MEMS Resonators
_h[electronic resource] /
_cedited by Harmeet Bhugra, Gianluca Piazza.
250 _a1st ed. 2017.
264 1 _aCham :
_bSpringer International Publishing :
_bImprint: Springer,
_c2017.
300 _aXII, 424 p. 231 illus., 127 illus. in color.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aMicrosystems and Nanosystems,
_x2198-0071
505 0 _aAIN Thin Film Processing and Basic Properties -- Lead Zirconate Titanate (PZT) for M/NEMS -- Gallium Nitride for M/NEMS -- Lithium Niobate for M/NEMS Resonators -- Quality Factor and Coupling in Piezoelectric MEMS Resonators -- Flexural Piezoelectric Resonators -- Laterally Vibrating Piezoelectric MEMS Resonators -- BAW Piezoelectric Resonators -- Shear Piezoelectric MEMS Resonators -- Temperature Compensation of Piezo-MEMS Resonators -- Computational Modeling Challenges -- Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators -- Reliability and Quality Assessment (Stability and Packages) -- Large Volume Testing and Calibration -- High Frequency Oscillators for Mobile Devices -- BAW Filters and Duplexers for Mobile Communication. .
520 _aThis book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
650 0 _aElectronics.
_93425
650 0 _aMicrotechnology.
_928219
650 0 _aMicroelectromechanical systems.
_96063
650 0 _aNanotechnology.
_94707
650 0 _aOptical materials.
_97729
650 1 4 _aElectronics and Microelectronics, Instrumentation.
_932249
650 2 4 _aMicrosystems and MEMS.
_962484
650 2 4 _aNanotechnology.
_94707
650 2 4 _aOptical Materials.
_97729
700 1 _aBhugra, Harmeet.
_eeditor.
_4edt
_4http://id.loc.gov/vocabulary/relators/edt
_962485
700 1 _aPiazza, Gianluca.
_eeditor.
_4edt
_4http://id.loc.gov/vocabulary/relators/edt
_962486
710 2 _aSpringerLink (Online service)
_962487
773 0 _tSpringer Nature eBook
776 0 8 _iPrinted edition:
_z9783319286860
776 0 8 _iPrinted edition:
_z9783319286877
776 0 8 _iPrinted edition:
_z9783319804057
830 0 _aMicrosystems and Nanosystems,
_x2198-0071
_962488
856 4 0 _uhttps://doi.org/10.1007/978-3-319-28688-4
912 _aZDB-2-ENG
912 _aZDB-2-SXE
942 _cEBK
999 _c80983
_d80983