000 | 04228nam a22005895i 4500 | ||
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001 | 978-3-319-28688-4 | ||
003 | DE-He213 | ||
005 | 20220801222628.0 | ||
007 | cr nn 008mamaa | ||
008 | 170110s2017 sz | s |||| 0|eng d | ||
020 |
_a9783319286884 _9978-3-319-28688-4 |
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024 | 7 |
_a10.1007/978-3-319-28688-4 _2doi |
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072 | 7 |
_aTJF _2bicssc |
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_a621.381 _223 |
245 | 1 | 0 |
_aPiezoelectric MEMS Resonators _h[electronic resource] / _cedited by Harmeet Bhugra, Gianluca Piazza. |
250 | _a1st ed. 2017. | ||
264 | 1 |
_aCham : _bSpringer International Publishing : _bImprint: Springer, _c2017. |
|
300 |
_aXII, 424 p. 231 illus., 127 illus. in color. _bonline resource. |
||
336 |
_atext _btxt _2rdacontent |
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337 |
_acomputer _bc _2rdamedia |
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338 |
_aonline resource _bcr _2rdacarrier |
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347 |
_atext file _bPDF _2rda |
||
490 | 1 |
_aMicrosystems and Nanosystems, _x2198-0071 |
|
505 | 0 | _aAIN Thin Film Processing and Basic Properties -- Lead Zirconate Titanate (PZT) for M/NEMS -- Gallium Nitride for M/NEMS -- Lithium Niobate for M/NEMS Resonators -- Quality Factor and Coupling in Piezoelectric MEMS Resonators -- Flexural Piezoelectric Resonators -- Laterally Vibrating Piezoelectric MEMS Resonators -- BAW Piezoelectric Resonators -- Shear Piezoelectric MEMS Resonators -- Temperature Compensation of Piezo-MEMS Resonators -- Computational Modeling Challenges -- Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators -- Reliability and Quality Assessment (Stability and Packages) -- Large Volume Testing and Calibration -- High Frequency Oscillators for Mobile Devices -- BAW Filters and Duplexers for Mobile Communication. . | |
520 | _aThis book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers. | ||
650 | 0 |
_aElectronics. _93425 |
|
650 | 0 |
_aMicrotechnology. _928219 |
|
650 | 0 |
_aMicroelectromechanical systems. _96063 |
|
650 | 0 |
_aNanotechnology. _94707 |
|
650 | 0 |
_aOptical materials. _97729 |
|
650 | 1 | 4 |
_aElectronics and Microelectronics, Instrumentation. _932249 |
650 | 2 | 4 |
_aMicrosystems and MEMS. _962484 |
650 | 2 | 4 |
_aNanotechnology. _94707 |
650 | 2 | 4 |
_aOptical Materials. _97729 |
700 | 1 |
_aBhugra, Harmeet. _eeditor. _4edt _4http://id.loc.gov/vocabulary/relators/edt _962485 |
|
700 | 1 |
_aPiazza, Gianluca. _eeditor. _4edt _4http://id.loc.gov/vocabulary/relators/edt _962486 |
|
710 | 2 |
_aSpringerLink (Online service) _962487 |
|
773 | 0 | _tSpringer Nature eBook | |
776 | 0 | 8 |
_iPrinted edition: _z9783319286860 |
776 | 0 | 8 |
_iPrinted edition: _z9783319286877 |
776 | 0 | 8 |
_iPrinted edition: _z9783319804057 |
830 | 0 |
_aMicrosystems and Nanosystems, _x2198-0071 _962488 |
|
856 | 4 | 0 | _uhttps://doi.org/10.1007/978-3-319-28688-4 |
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912 | _aZDB-2-SXE | ||
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