000 | 02218nam a2200337 i 4500 | ||
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001 | CR9780511777691 | ||
003 | UkCbUP | ||
005 | 20230516164927.0 | ||
006 | m|||||o||d|||||||| | ||
007 | cr|||||||||||| | ||
008 | 141103s2011||||enk o ||1 0|eng|d | ||
020 | _a9780511777691 (ebook) | ||
020 | _z9780521516136 (hardback) | ||
040 |
_aUkCbUP _beng _erda _cUkCbUP |
||
050 | 0 | 0 |
_aTA418.9.T45 _bT82 2011 |
082 | 0 | 0 |
_a621.3815/2 _222 |
100 | 1 |
_aTu, K. N. _q(King-ning), _d1937- _eauthor. _968255 |
|
245 | 1 | 0 |
_aElectronic thin film reliability / _cKing-Ning Tu. |
264 | 1 |
_aCambridge : _bCambridge University Press, _c2011. |
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300 |
_a1 online resource (xvi, 396 pages) : _bdigital, PDF file(s). |
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336 |
_atext _btxt _2rdacontent |
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337 |
_acomputer _bc _2rdamedia |
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338 |
_aonline resource _bcr _2rdacarrier |
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500 | _aTitle from publisher's bibliographic system (viewed on 05 Oct 2015). | ||
520 | _aThin films are widely used in the electronic device industry. As the trend for miniaturization of electronic devices moves into the nanoscale domain, the reliability of thin films becomes an increasing concern. Building on the author's previous book, Electronic Thin Film Science by Tu, Mayer and Feldman, and based on a graduate course at UCLA given by the author, this new book focuses on reliability science and the processing of thin films. Early chapters address fundamental topics in thin film processes and reliability, including deposition, surface energy and atomic diffusion, before moving onto systematically explain irreversible processes in interconnect and packaging technologies. Describing electromigration, thermomigration and stress migration, with a closing chapter dedicated to failure analysis, the reader will come away with a complete theoretical and practical understanding of electronic thin film reliability. Kept mathematically simple, with real-world examples, this book is ideal for graduate students, researchers and practitioners. | ||
650 | 0 |
_aThin films _vTextbooks. _968256 |
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650 | 0 |
_aReliability (Engineering) _vTextbooks. _968257 |
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776 | 0 | 8 |
_iPrint version: _z9780521516136 |
856 | 4 | 0 | _uhttps://doi.org/10.1017/CBO9780511777691 |
942 | _cEBK | ||
999 |
_c82309 _d82309 |